HERAEUS MATERIALS

TSC-Synthetic

TSC-Synthetic has very high purity and is produced from synthetic fused silica powder. It has excellent visual quality with no bubbles or inclusions larger than 0.1 mm. The high purity of TSC-Synthetic ensures excellent deep UV transmission.

TSC-Synthetic is available in large sizes (up to 600 mm x 2000 mm).

CHEMICAL PURITY

Typical trace elements and OH content in quartz glass (ppm by weight oxide)

 
Elements Al Ca Co Cr Cu Fe K Li Mg Mn Na Ti V Zn Zr OH Content
TSC-Synthetic <0.04 <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 0.01 <0.01 0.1 0.15 0.01 <0.01 0.01 0.02 130
 

Recommended use of TSC-Synthetic

TSC-Synthetic is ideally suited for making high-end semiconductor or flat panel display manufacturing equipment parts such as rings, windows, wet bench tanks or sputtering targets where high purity, low particulate generation and/or deep UV transmission are essential.