HERAEUS MATERIALS

OFM 70 Rotosil / OFM 370 / OFM 970

OFM is an opaque quartz glass that is manufactured in an arc melting process. Primarily axially-symmetrical shapes such as tubes and crucibles are formed by this production process. Subsequent hot-working steps allow the manufacture of plates, dishes, ingots and thin-walled tubes. Due to light scattering from fine bubbles, OFM parts appear opaque or translucent depending on the raw material employed.

OFM 70 Rotosil is predominantly used in processes that involve high temperatures and/or aggressive media. The material-specific electrical and thermal properties further enable a broad application spectrum.
Fields of application:
• Precious metals recycling
• Fluorescent industry
• High temperature processes
• Electric filter production
• Chemical process engineering (tanks, tubes, bowls, etc.)
• Calcination and annealing processes

OFM 370 is used in processes requiring resistance to thigh temperatures and thermal shock. Based on the high raw material purity and further internal purification steps, this material qualifies for the semiconductor industry.
Fields of application:
• Solar industry
• Semiconductor industry
• Waveguide optic industry
• Glass industry

OFM 970 was specifically developed for high temperature processes that require high thermal isolation capabilities. Due to the very high purity, this material is mainly applied in ultrapure processes.
Fields of application:
• Production of optical glasses
• Microlithography
• Semiconductor industry
• Waveguide optic industry

CHEMICAL PURITY

Typical trace elements and OH content in quartz glass (ppm by weight oxide)
 
Elements Li Na K Mg Ca Fe Cu Cr Mn Ti Al Zr
OFM 70 Rotosil 4 24 31 8 28 45 0.5 0.4 1 120 200 20
OFM 370 0.58 0.85 0.75 <0.05 0.45 0.20 <0.05 <0.05 <0.05 1.13 15.50 0.10
OFM 970 <0.01 0.04 0.035 0.01 0.05 0.06 0.05 0.02 <0.01 0.02 10.00* 0.01