HERAEUS MATERIALS

HSQ 900 / HSQ 910

HSQ 900 and 910 are two varieties of synthetic fused silica with different contents of OH and Cl. As a result of synthetic precursors, both materials feature highest possible purity levels with total contamination in the ppb range. Whereas HSQ900 is the low OH variety with a typical content of 0.2 ppm, HSQ910 is characterized by a relatively low Cl concentration. The viscosity of fused silica is lower than that of other fused quartz types.

CHEMICAL PURITY


 
Elements Al Ca Cl Cr Cu Fe K Li Mg Mn Na Ti Zr OH Content
HSQ 900 <0.04 <0.02 1500 <0.001 <0.001 <0.03 <0.01 <0.002 <0.01 <0.0005 <0.01 <0/03 <0.04 0.2
HSQ 910 <0.04 <0.02 <50 <0.001 <0.001 <0.03 <0.01 <0.002 <0.01 <0.0005 <0.01 <0/03 <0.04 250

Characteristics

Ultra-pure, OH < 0.2 ppm (HSQ 900) or OH < 250 ppm (HSQ 910), total impurities in the ppb range, minimum number of defect centers


Products and applications

Applications with highest requirements for highest purity, e. g. semiconductor processes