HERAEUS MATERIALS

HSQ 700

HSQ 700 is an electrically fused quartz glass with further reduced alkali content. Due to the lowered total concentration of Li, Na, and K to typically below 0.2 ppm, HSQ 700 features a higher temperature stability and lower devitrification rate. This makes HSQ700 the preferred choice for the most demanding applications.

CHEMICAL PURITY

Typical trace elements and OH content in quartz glass (ppm by weight oxide)

 
Elements Al Ca Cl Cr Cu Fe K Li Mg Mn Na Ti Zr OH Content
HSQ 700 15 0.5 n.s. <0.05 <0.05 0.1 0.1 0.05 0.05 <0.05 0.05 1.1 0.7 <30

 


Characteristics

Low alkali content by particle size of higher purity, alkali metal/OH content (< 0.05 ppm / < 30 ppm).


Products and applications

Semiconductor processes with very high purity requirements.