HERAEUS MATERIALS

HSQ 330

HSQ 330 is a high purity electrically fused quartz glass with guaranteed maximum contamination levels. Physically equivalent to HSQ 300, this is the material of choice for any application that requires proven purity..

CHEMICAL PURITY

Typical trace elements and OH content in quartz glass (ppm by weight oxide).

 
Trace Elements Al Ca Cl Cr Cu Fe K Li Mg Mn Na Ti Zr OH Content
Typical 15 0.5 n.s. <0.05 <0.03 0.1 0.2 0.6 0.05 <0.05 0.2 1.1 0.7 <30
Guaranteed <25 1.0 n.s. n.s. 0.1 0.5 0.8 1.5 0.3 n.s. <0.5 n.s. n.s. ≤40
*The OH content is below 30 ppm. This can be further reduced via heat treatment under the right conditions.

Characteristics

Tubes, bars, rods, blocks, plates, discs with guaranteed chemical purity.


Products and applications

Semiconductor processes with various high purity requirements from room temperature to high temperatures: CVD tubes, diffusion furnaces, epitaxy chambers, etching systems; optical applications; tubes, bars, rods, blocks, HSQ 330 P E Tubes, bars, rods, blocks, plates, discs plates, discs, flanges.