HERAEUS MATERIALS

HSQ 300

HSQ 300 is the standard quality of Heraeus Quarzglas for semiconductor applications. This electrically fused quartz glass often exceeds the strict purity requirements set forth by the semiconductor industry. The multi-step production process strongly reduces the bubble content and leads to higher material homogeneity.

CHEMICAL PURITY

Typical trace elements and OH content in quartz glass (ppm by weight oxide).

 
Elements Al Ca Cl Cr Cu Fe K Li Mg Mn Na Ti Zr OH Content
HSQ 300 15 0.5 n.s. <0.05 <0.05 0.1 0.4 0.6 0.05 <0.05 0.3 1.1 0.7 <30
 

Characteristics

Quartz glass of semiconductor quality, thermally stable up to 1160 °C (preliminary: 1300 °C), low heat conductivity of 1,38–2,68 W/mK, alkali metal content < 1.5 ppm, OH content < 30 ppm.


Products and applications

Semiconductor processes with various high purity requirements from room temperature to high temperatures: CVD tubes, diffusion furnaces, epitaxy chambers, etching systems; optical applications; tubes, bars, rods, blocks, HSQ 330 P E Tubes, bars, rods, blocks, plates, discs plates, discs, flanges.