HERAEUS MATERIALS

HSQ 100

HSQ 100 is a single step, electrically fused quartz glass with excellent properties that qualify the material for semiconductor applications. Highly purified natural quartz sand is used as raw material.

CHEMICAL PURITY

Typical trace elements and OH content in quartz glass (ppm by weight oxide)

 
Elements Al Ca Cl Cr Cu Fe K Li Mg Mn Na Ti Zr OH Content
HSQ 100 15 0.5 n.s. <0.05 <0.05 0.1 0.4 0.6 0.05 <0.05 0.3 1.1 0.7 <30*
* For HSQ 100 rods. OH content of other HSQ 100 semi-finished products on customer request

Characteristics

Quartz glass of semiconductor quality.


Products and applications

Bar, plate and tube material.